A highly precise micro abrasive jet machining technology using fine abrasive
particles of 3-40micron.


The New Dry Etching Technology

In the microblasting process, there are two typical processing methods. The first is to
perform blasting on the entire surface of a rather broad area of work pieces. This can be
done or without a specified pattern by using a blasting nozzle from 4 to 10mm diam.
These and is to perform concentrated spot blasting on minute parts set at the blasting
position without the mask by using the nozzle having a small blasting hole of approximately
0.15mm diam..

Efficient and Uniformed Blasting on a
broad surface.
Concentrated spot blasting without
masking.
The combination of our Programmed
Constant Quantity Feeding Device
(Patent Registered) and Foreign
Materials Separator, performs
accurate and stable machining.

(Micro Blasting Machines MB1)

The Micro-nozzle's concentrated spot
blasting performs with can perform
a higher efficiency and excellent aspect
ratio.

(Micro Blasting Machines MB2)

Features and Advantages
ž Dry process(no chemicals)
ž Less chipping and cracking
ž Less deterioration
ž High productivity
ž Complicated patterns are possible
ž Lower initial cost
ž Can process numerous materials
ž Less damage to workpiece

Microblasting by MB1
Mask Aligner
Masked Sample
(Before Microblasting)
After Microblasting

Machining Accuracy
œ Line width 20micron (plus or minus 5micron)
œ Hole diameter 30micron (plus or minus 5micron)
œ Chipping approximately 10micron

The best abrasive jet machining
level in the world
Drilling of Glass Substrate by Microblaster MB2

1.Machining characteristic and accuracy of the Microblasting Process
The accuracy achievable by microblasting is on the level of 10micron while running at
high productivity. The Microblasting process is flexible as well as productive allowing
operations such as grinding, electron beam processing and etching that require an
accuracy level of 1micron. Operations such as machining and electric-discharge
processing requires an accuracy of more or less 100micron.


2.High processing grade
By use of the Foreign Materials Separator and a Cyclone for fine particles, the
abrasives are recycled in the system and used repeatedly by separating fine dust
and coarsewastes generated from the system that are no longer contributable to the
process. These separating mechanisms are also effective forpreventing damages of
process materials and for stabilizing the result of microblasting process.

œChippingFApproximately 5micron

œSurface roughnessF0.02micronRa


3.High productivity while machining complicated patterns
The Microblaster can machine various patterns, at a productive rate, by use of the
Blasting Condition Control System, the Numerical Controlled Processing Table and
using the Photoresist Mask.

œHigh productivity

œMachining of complicated patterns

œComplicated three-dimensional configuration can be materialized

MICRO BLASTING MACHINES MB1
ƒ‚r‚‚…‚ƒ‚‰‚†‚‰‚ƒ‚‚”‚‰‚‚Ž‚“„
Abrasive ς220`ς800
Abrasive feed Constant feeding device
Abrasive reclaimer Special cyclone device
Separation of foreign materials Coarse particle separator
Equipment dimensions (mm) 1000W~1400L~1500H






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