SEMICONDUCTORS






Roughening wafer chucks
Drilling of electrodes for Plasma etching
Forming holes completely through IC packages
Etching of silicon wafer
Boring of glass wafer
Etching of ceramics wafer susceptor
Etching of silicon wafer

ELECTRONIC COMPONENTS








Roughening reverse surfaces of SAW filter
substrate
Forming electrodes of ceramic filters
Grooving of printer heads
Etching of crystal device
Stain removal and micro deburring of condensers
Drilling of sensor glass substrate
Suface cleaning of IC package
Surface cleaning of IC package

FLAT PANEL DISPLAYS RELATED






Forming ribs on PDP
Grooving of LCD glass substrate
Etching of metallic mold for LCD filter
Etching of OELD cover glass
Peeling thin firm layer of silicon substrate or
glass substrate
Etching of glass substrate

MEMS


The micro-stracture is etched and formed on
PZT piezoelectric materials

OTHERS
Deburring of Aluminum Board


before


after





Etching of metallic foils (aluminum,copper)
Cutting of quartz glass
Rib forming of alumina substrate
Roughening metallic mold
Etching of stainless steel
Deburring of metallic parts

Materials
Glass
Carbon
Quartz


Silicon
Al3N4
Sapphire


Ceramics
Al3O3
Metal etc.
(Stainless steel,steel etc.)

Applications
Grooving
Via hole
Cleaning
Slitting
Gettering
De-smear
Forming
Boring
Etching
Deburring
Patterning
Marking
Beveling
etc.
Through hole
Cutting
Peeling
Dicing
De-marking
Roughening


APPLICATION SAMPLES (Material Classification)
Glass Ceramics Silicon Others

Electrode forming of
Ceramic filter

Etching of Metal

Deburring of IC package

Deburring of Aluminum Board








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